What is Epitaxial growth?
A technique for growing a single-crystal thin film on a single-crystal substrate with the same crystal orientation as the substrate.
Field: Epitaxial growth
Epitaxial growth in the explanations
In epitaxial growth, atoms stack up following the substrate's crystal arrangement, forming a single-crystal film with the same orientation.
Which correctly describes epitaxial growth?Thermal SiO2, by contrast, is an amorphous film formed by consuming silicon, not epitaxial growth.
Which is an example of heteroepitaxial growth?Because epitaxial growth rates depend on crystal-plane orientation, steps from underlying patterns can shift laterally as the layer grows (pattern shift), become distorted, or vanish (washout).
When silicon is grown epitaxially on a substrate with patte…
Questions that mention Epitaxial growth (18)
- What is the main purpose of growing raised crystal on the fins in the source and drain of a FinFET by epitaxial growth?
- Which correctly describes epitaxial growth?
- Which gases are used as sources for silicon epitaxial growth?
- What is the phenomenon called in which impurities from the substrate or elsewhere are incorporated into the growing layer through the gas phase during epitaxial growth?
- What is the main purpose of heating the wafer in high-temperature hydrogen just before silicon epitaxial growth?
- In epitaxial growth by CVD, the growth rate depends strongly on temperature in the relatively low-temperature regime. Why?
- In SiC epitaxial growth, what is the main reason for using substrates tilted a few degrees from the crystal axis (with an off-angle)?
- Which is an advantage of performing silicon epitaxial growth at reduced pressure?
- What is it called when doping gas is flowed during epitaxial growth to add dopants at the same time as growth?
- Compared with thermal diffusion, what is an advantage of adding dopants during epitaxial growth?
- In advanced CMOS processes, why is it necessary to lower the temperature of silicon and SiGe epitaxial growth?
- In silicon epitaxial growth, what is the main role of the large flow of hydrogen (H2) supplied along with the source gas?
- Which type of reactor is mainstream for silicon epitaxial growth on 300 mm wafers?
- Which gas is used as a carrier gas and reducing atmosphere in epitaxial growth and heat treatment?
- Which gas is used as the germanium source in SiGe epitaxial growth?
Related terms
SiGe (silicon-germanium) Silane (SiH4) Phosphine (PH3) Autodoping Native oxide Precursor SiC (silicon carbide) FinFET Lattice mismatch Mobility