Process materials (gases and chemicals)

Which gas is used as a carrier gas and reducing atmosphere in epitaxial growth and heat treatment?

  1. AOzone
  2. BHydrogen (H2)
  3. CChlorine
Show answer and explanation

Answer: B. Hydrogen (H2)

Hydrogen is used as a carrier gas for epitaxial sources, as a reducing atmosphere to remove native oxide, in forming gas anneals and more. It is flammable and explosive, so it is used with safety measures such as leak detection.

Practice this topic Back to topic

More Process materials (gases and chemicals) questions

  1. What must be watched for when handling metal-organic compounds such as trimethylgallium (TMGa), used as MOCVD sources?
  2. What purity does '6N' denote for a gas?
  3. Which gas, one of the most heavily used in semiconductor fabs, is supplied by pipeline for purging and as an atmosphere gas?
  4. In ArF immersion lithography, which film is applied over the photoresist to keep the immersion water from contacting it directly?
  5. Which is a typical material used for low-k interlayer dielectrics?