What is Thermal diffusion?
A doping method that diffuses impurity atoms into a semiconductor at high temperature. They spread from regions of high concentration to low.
Field: Oxidation and diffusion
Thermal diffusion in the explanations
Thermal diffusion spreads dopants inward from the surface, so it can only produce profiles that peak at the surface and fall off gradually.
Compared with thermal diffusion, what is an advantage of ad…Thermal diffusion was often done in two steps: predeposition introduces a set dose shallowly while holding surface concentration constant, then drive-in stops the supply and heats the wafer to spread that fixed dose to the desired depth and profile.
In thermal diffusion, what is the step called that drives d…Thermal diffusion ties surface concentration to depth and, being hot, required oxide masks.
What is the main advantage of ion implantation over thermal…
Questions that mention Thermal diffusion (6)
- Compared with thermal diffusion, what is an advantage of adding dopants during epitaxial growth?
- In thermal diffusion, what is the step called that drives dopants deeper after a fixed amount has been introduced at the surface?
- In thermal diffusion, which pair correctly gives the profile shapes for diffusion with a constant surface concentration and for diffusion of a fixed amount of impurity?
- Which compound has been used as a liquid diffusion source for introducing phosphorus into silicon by thermal diffusion?
- What is the main advantage of ion implantation over thermal diffusion?
- What is the principle of ion implantation?
Related terms
Ion implantation Drive-in Epitaxial growth HBT (heterojunction bipolar transistor) Phosphine (PH3) Photoresist Bird's beak Deal-Grove model Dry oxidation Forming gas anneal