Epitaxial growth

Which is an example of heteroepitaxial growth?

  1. AGrowing silicon on a silicon substrate
  2. BGrowing SiGe on a silicon substrate
  3. CThermally oxidizing a silicon substrate
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Answer: B. Growing SiGe on a silicon substrate

Growing the same material as the substrate is called homoepitaxy, and growing a different material is called heteroepitaxy. SiGe on silicon and GaN on sapphire or SiC are examples of heteroepitaxy. SiO2 formed by thermal oxidation is amorphous and is not epitaxial growth.

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More Epitaxial growth questions

  1. What is MOCVD (metal-organic chemical vapor deposition) mainly used for?
  2. What problem tends to occur when there is a large difference in lattice constant (lattice mismatch) between the substrate and the grown film?
  3. Which is a characteristic of MBE (molecular beam epitaxy)?
  4. Which gases are used as sources for silicon epitaxial growth?
  5. Which correctly describes selective epitaxial growth?