What is Heteroepitaxy?
Growing a single-crystal film of a material different from the substrate, such as SiGe on silicon or GaN on sapphire. Growth of the same material is homoepitaxy.
Field: Epitaxial growth
Heteroepitaxy in the explanations
Growing the same material as the substrate is homoepitaxy; growing a different one is heteroepitaxy—examples include SiGe on silicon, GaN on sapphire or SiC, and AlGaAs on GaAs.
Which is an example of heteroepitaxial growth?
Questions that mention Heteroepitaxy (2)
Related terms
SiGe (silicon-germanium) GaN (gallium nitride) SiC (silicon carbide) GaAs (gallium arsenide) Epitaxial growth 4H-SiC Autodoping Critical thickness Epitaxial lateral overgrowth (ELO) HVPE (hydride vapor phase epitaxy)