What is Native oxide?
A thin oxide about 1 nm thick that forms naturally when silicon is exposed to air or water. Because it raises contact resistance and disturbs epitaxial growth, it is removed right before such steps.
Field: CMP and cleaning
Native oxide in the explanations
The first transistor (1947) was germanium, but its small gap leads to higher leakage and it lacks a good native oxide, so silicon took over.
Which value is closest to the band gap of germanium (Ge) at…But GaAs wafers are costlier and harder to scale up, and it lacks a good native oxide, making it unsuitable for large digital circuits.
What is the main reason GaAs has been used in RF amplifiers…In VPD, hydrofluoric acid vapor decomposes the native oxide, and a small droplet is scanned across the wafer to collect surface metal impurities.
To analyze metal contamination on a wafer surface with high…
Questions that mention Native oxide (11)
- To prevent fine structures from collapsing, which method removes native oxide and the like without using liquids?
- Which value is closest to the band gap of germanium (Ge) at room temperature?
- What is the main reason GaAs has been used in RF amplifiers for mobile phones and similar applications?
- To analyze metal contamination on a wafer surface with high sensitivity, which preparation method dissolves the surface oxide with hydrofluoric acid vapor and collects it in a droplet for analysis?
- What is the main purpose of heating the wafer in high-temperature hydrogen just before silicon epitaxial growth?
- Which is closest to the temperature range at which silicon thermal oxidation is generally carried out?
- What is the main purpose of SC-1 (a mixture of ammonia and hydrogen peroxide) in RCA cleaning?
- What is the main purpose of cleaning with dilute hydrofluoric acid (DHF)?
- Which set correctly lists the kinds of surface contamination removed from wafers by cleaning?
- Which metal has been used in many LSIs for the top-level bond pads where wire bonding is done?
- Which gas is used as a carrier gas and reducing atmosphere in epitaxial growth and heat treatment?
Related terms
SC-1 (APM) SC-2 (HPM) Mobility Epitaxial growth NF3 (nitrogen trifluoride) Band gap SiGe (silicon-germanium) GaAs (gallium arsenide) Effective mass ICP (inductively coupled plasma)