What is Arsine (AsH3)?
A gas compound of arsenic and hydrogen used to introduce n-type dopant (arsenic) and to grow compound semiconductors such as GaAs. It is extremely toxic.
Arsine (AsH3) in the explanations
Phosphine and arsine are extremely toxic gases, harmful even at very low concentrations.
Which correctly describes phosphine (PH3) and arsine (AsH3)…Arsine (AsH3) gas used in manufacturing is even more toxic, requiring rigorous gas detection and abatement systems.
Why is care needed when handling GaAs wafer processing debr…Phosphine (PH3) supplies phosphorus, arsine (AsH3) arsenic and GeF4 germanium.
Which gas is typically used in the ion source of an implant…
Questions that mention Arsine (AsH3) (5)
- Which correctly describes phosphine (PH3) and arsine (AsH3), used to introduce n-type dopants?
- What is the safety advantage of storing and supplying toxic gases such as arsine and phosphine adsorbed on a sorbent in containers below atmospheric pressure?
- Why is care needed when handling GaAs wafer processing debris and waste?
- Which gas is typically used in the ion source of an implanter to produce boron ions?
- Which source gases are used to introduce the p-type dopant boron?
Related terms
Phosphine (PH3) GaAs (gallium arsenide) Local exhaust ventilation Mass flow controller (MFC) NF3 (nitrogen trifluoride) Precursor Silane (SiH4) Specialty gases TMAH Ultrapure water