What is 3D NAND?

NAND flash in which memory cells are stacked vertically in many layers to increase capacity. It was introduced to get past the limits of planar scaling, and layer counts now exceed 200.

Field: SRAM and flash memory

3D NAND in the explanations

Questions that mention 3D NAND (17)

  1. Which correctly describes 3D NAND flash memory?
  2. In charge-trap cells, widely used in 3D NAND, which material is commonly used for the layer that stores charge?
  3. Which is closest to the number of layers in recent 3D NAND?
  4. In 3D NAND, what is the structure called in which the edge of the stack is shaped into steps so that each layer's word line can be connected?
  5. In 3D NAND, what is the main advantage of placing peripheral circuits such as sense amplifiers beneath the memory array (CMOS under Array and similar)?
  6. In 3D NAND, which is a correct advantage of making the memory cell array and peripheral circuits on separate wafers and bonding them together?
  7. Which correctly describes the idea of 3D DRAM, under research and development as a way to increase future DRAM capacity?
  8. Which is a characteristic of radical oxidation, which uses oxygen radicals?
  9. Which gas is used as the source for tungsten CVD?
  10. Which is an example of a typical material deposited by ALD?
  11. What is the technique called that transfers a pattern by pressing a mold with fine patterns into resist?
  12. What is the aspect ratio of a hole or trench formed by etching?
  13. Which solution is commonly used for wet etching of silicon nitride?
  14. What is a mask of nitride, carbon or similar material called, used when photoresist alone cannot survive as a mask, such as when etching deep holes?
  15. Which are examples of profile defects seen in high-aspect-ratio etching?

Related terms

CMOS Aspect ratio Radical Selectivity TLC (triple-level cell) Charge-trap cell Floating gate Word line Plasma Crystal orientation

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