SRAM and flash memory
In 3D NAND, what is the structure called in which the edge of the stack is shaped into steps so that each layer's word line can be connected?
- AStaircase structure
- BDamascene structure
- CTrench structure
Show answer and explanation
Answer: A. Staircase structure
In 3D NAND, tens to hundreds of conductive layers acting as word lines are stacked, and each must be individually contacted. The edge of the array is therefore etched into steps, exposing the top of each layer so contacts can land on it. More layers make the staircase harder to form and require more area.
- A. Correct. It is a stepped structure for connecting to each layer.
- B. Damascene is a process of filling trenches with metal to form wiring.
- C. A trench is a groove in the substrate, not a structure for connecting to each layer.