Lithography

What is the technique called that transfers a pattern by pressing a mold with fine patterns into resist?

  1. AElectron-beam lithography
  2. BEUV lithography
  3. CNanoimprint lithography
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Answer: C. Nanoimprint lithography

Nanoimprint lithography presses a mold with a relief pattern into resist and cures it with UV light or heat to copy the shape. It needs no expensive optics and may lower costs, and it is being put into practical use in some memory manufacturing.

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More Lithography questions

  1. Which equipment is mainly used to write the patterns of photomasks (reticles)?
  2. What is the role of the thin membrane (pellicle) stretched over a photomask at a fixed distance?
  3. What is the main purpose of the bottom anti-reflective coating (BARC) applied under resist?
  4. Which correctly describes 'High-NA EUV', developed as the next-generation EUV exposure tool?
  5. Which metric describes nanometer-scale roughness on the sidewalls of fine resist patterns?