What is Aspect ratio?
The ratio of a hole's or trench's depth to its width. Higher ratios make etching and deposition harder; memory holes in 3D NAND reach several tens or more.
Field: Etching
Aspect ratio in the explanations
Aspect ratio is a feature's depth divided by its width—a hole 100 nm across and 1 µm deep has an aspect ratio of 10.
What is the aspect ratio of a hole or trench formed by etch…DRAM is approaching the limits of capacitor aspect ratio and cell-transistor scaling.
Which correctly describes the idea of 3D DRAM, under resear…At the bottom of narrow, deep features, radicals are lost to wall collisions, ions are deflected by charging, and reaction products escape slowly, so etch rate falls as aspect ratio rises.
What is the phenomenon called in which the etch rate decrea…
Questions that mention Aspect ratio (5)
- What is the aspect ratio of a hole or trench formed by etching?
- Which correctly describes the idea of 3D DRAM, under research and development as a way to increase future DRAM capacity?
- What is the phenomenon called in which the etch rate decreases as patterns become narrower and deeper?
- What is the main cause of pattern collapse when cleaning and drying high-aspect-ratio patterns?
- What is the effect of increasing a wire's thickness (height) without changing its width?
Related terms
3D NAND Selectivity ARDE (aspect-ratio-dependent etching) Pattern collapse RC delay Crosstalk ALE (atomic layer etching) Anisotropic etching Antenna effect Ashing