What is SEM (scanning electron microscope)?

SEM (scanning electron microscope) in the explanations

• An SEM scans an electron beam over the sample surface and forms an image by detecting the secondary and backscattered electrons emitted.

  Which correctly describes the principle of the scanning ele…

• ADC (Automatic Defect Classification) automatically sorts review SEM images into categories such as particles, pattern defects and scratches, speeding up root-cause identification.

  Which function captures SEM images of defects found in insp…

• Detected defects are then examined in detail with an SEM and classified (review).

  Which is a typical principle used in defect inspection tool…

Questions that mention SEM (scanning electron microscope) (6)

1. Which correctly describes the principle of the scanning electron microscope (SEM)?
2. What can be determined with EDX (energy-dispersive X-ray spectroscopy), used together with SEM and TEM?
3. When observing insulating samples with an SEM, which is a correct way to prevent charging (charge-up)?
4. Which function captures SEM images of defects found in inspection and automatically classifies their types from the images?
5. Which is a typical principle used in defect inspection tools that detect particles and pattern defects on wafers?
6. Which correctly describes observing a cross-section in detail after breaking or milling the wafer?

Related terms

TEM (transmission electron microscope) EDX (energy-dispersive X-ray spectroscopy) FIB (focused ion beam) AFM (atomic force microscope) CD-SEM Defect inspection system Ellipsometry Four-point probe method SIMS (secondary ion mass spectrometry) TXRF (total reflection X-ray fluorescence)