A microscope that observes thinned samples by passing an electron beam through them. With atomic-level resolution, it reveals cross-sectional structures and crystal defects.
Field: Metrology and analysis
A TEM forms images from electrons that pass through the sample, so the sample must be very thin.
Which correctly describes the sample preparation needed to …It is used to prepare thin lamellae for TEM, observe cross-sections of defect sites, and modify the wiring of prototype chips.
What are the main uses of focused ion beam (FIB) systems?Cross-sectional SEM or TEM observation breaks the wafer or mills it with FIB, so the observed area can no longer be used as product (destructive analysis).
Which correctly describes observing a cross-section in deta…FIB (focused ion beam) SEM (scanning electron microscope) EDX (energy-dispersive X-ray spectroscopy) AFM (atomic force microscope) CD-SEM Defect inspection system Ellipsometry Four-point probe method SIMS (secondary ion mass spectrometry) TXRF (total reflection X-ray fluorescence)