What is FIB (focused ion beam)?
An instrument that mills or deposits material with a finely focused ion beam. It is used for cross-sectioning tiny areas, preparing thin TEM samples and editing circuits.
Field: Metrology and analysis
FIB (focused ion beam) in the explanations
An FIB focuses ions such as gallium onto a sample to mill a target location with nanometer precision, or deposit films when combined with gases.
What are the main uses of focused ion beam (FIB) systems?For semiconductor devices, the area of interest is commonly cut into a thin lamella with a focused ion beam (FIB).
Which correctly describes the sample preparation needed to …Cross-sectional SEM or TEM observation breaks the wafer or mills it with FIB, so the observed area can no longer be used as product (destructive analysis).
Which correctly describes observing a cross-section in deta…
Questions that mention FIB (focused ion beam) (4)
- What are the main uses of focused ion beam (FIB) systems?
- Which correctly describes the sample preparation needed to observe a sample with a transmission electron microscope (TEM)?
- Which correctly describes observing a cross-section in detail after breaking or milling the wafer?
- Which analysis method field-evaporates atoms one by one from the tip of a needle-shaped specimen and detects their positions and identities to map the 3D distribution of atoms such as dopants?
Related terms
TEM (transmission electron microscope) SEM (scanning electron microscope) AFM (atomic force microscope) CD-SEM Defect inspection system EDX (energy-dispersive X-ray spectroscopy) Ellipsometry Four-point probe method SIMS (secondary ion mass spectrometry) TXRF (total reflection X-ray fluorescence)