Metrology and analysis

Which function captures SEM images of defects found in inspection and automatically classifies their types from the images?

  1. AATPG
  2. BAutomatic defect classification (ADC)
  3. CAPC
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Answer: B. Automatic defect classification (ADC)

Defect inspection tools detect many defects, but investigating their causes requires classifying their types. ADC (Automatic Defect Classification) automatically sorts review SEM images into categories such as particles, pattern defects and scratches, speeding up root-cause identification. Machine learning has also been applied in recent years.

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  1. Which correctly describes the general difference between "metrology" and "inspection" on a semiconductor production line?
  2. What is the main purpose of performing metrology and inspection partway through the process on a production line?
  3. In production-line metrology, why are only selected wafers or points often measured rather than all of them?
  4. Which correctly describes observing a cross-section in detail after breaking or milling the wafer?
  5. Which pair correctly names a measuring instrument's property of "small spread when measuring the same thing repeatedly" and that of "measured values being close to the true value"?