Metrology and analysis

What can be determined with EDX (energy-dispersive X-ray spectroscopy), used together with SEM and TEM?

  1. ASurface roughness
  2. BThe kinds and amounts of elements in the sample
  3. CInternal stress in films
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Answer: B. The kinds and amounts of elements in the sample

When an electron beam strikes a sample, characteristic X-rays with energies specific to each element are emitted. EDX analyzes those energies to determine the kinds and amounts of elements in the sample. Because it can analyze the composition of the spot observed under the electron microscope, it is widely used to analyze particles and defect sites.

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