An analysis method that measures the energies of characteristic X-rays emitted under an electron beam to identify which elements are present and how much. It is used with SEM or TEM.
Field: Metrology and analysis
EDX analyzes those energies to determine the kinds and amounts of elements in the sample.
What can be determined with EDX (energy-dispersive X-ray sp…SEM (scanning electron microscope) TEM (transmission electron microscope) AFM (atomic force microscope) CD-SEM Defect inspection system Ellipsometry FIB (focused ion beam) Four-point probe method SIMS (secondary ion mass spectrometry) TXRF (total reflection X-ray fluorescence)