What is SIMS (secondary ion mass spectrometry)?
A method that sputters a sample with primary ions and mass-analyzes the secondary ions to measure impurity depth profiles with high sensitivity.
Field: Metrology and analysis
SIMS (secondary ion mass spectrometry) in the explanations
SIMS irradiates the sample with primary ions to sputter its surface little by little and mass-analyzes the emitted secondary ions.
Which correctly describes SIMS (secondary ion mass spectrom…SIMS measures atomic concentration including inactive impurities, so comparing the two reveals how well the impurities have been activated.
Whereas SIMS measures the atomic concentration of impuritie…
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Related terms
Sputtering Ion implantation AFM (atomic force microscope) CD-SEM Defect inspection system EDX (energy-dispersive X-ray spectroscopy) Ellipsometry FIB (focused ion beam) Four-point probe method SEM (scanning electron microscope)