Metrology and analysis

When observing insulating samples with an SEM, which is a correct way to prevent charging (charge-up)?

  1. ALower the accelerating voltage, or coat the sample surface with a thin conductive film
  2. BRaise the accelerating voltage as high as possible
  3. CImmerse the sample in water
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Answer: A. Lower the accelerating voltage, or coat the sample surface with a thin conductive film

When an electron beam strikes an insulator, charge builds up instead of escaping, distorting the image and disturbing brightness. Charging is prevented by lowering the accelerating voltage to balance incoming and emitted electrons, coating the surface with a thin conductive film of gold or carbon, or observing under low-vacuum conditions.

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