What is Defect inspection system?
Equipment that finds particles and pattern defects on wafers, for example by detecting scattered light or by comparing images of neighboring dies.
Field: Metrology and analysis
Related terms
AFM (atomic force microscope) CD-SEM EDX (energy-dispersive X-ray spectroscopy) Ellipsometry FIB (focused ion beam) Four-point probe method SEM (scanning electron microscope) SIMS (secondary ion mass spectrometry) TEM (transmission electron microscope) TXRF (total reflection X-ray fluorescence)