What is APC (advanced process control)?

Automatically adjusting the process settings for the next lot or wafer based on earlier measurements, as in run-to-run control. It reduces variation.

Field: Yield and quality control

APC (advanced process control) in the explanations

APC (Advanced Process Control) uses measurement data to adjust equipment conditions automatically, reducing process variation.
Which type of control automatically adjusts equipment proce…

Questions that mention APC (advanced process control) (1)

Which type of control automatically adjusts equipment processing conditions for the next lot or wafer based on, for example, measurement results from earlier steps?

Related terms

CMP SPC (statistical process control) Cause-and-effect diagram Control chart FMEA (failure mode and effects analysis) Killer defect Pareto chart Poisson yield model Process capability index (Cpk) Systematic defect

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