An analysis method that shines X-rays on a crystal and uses the angles and intensities of the diffracted beams to determine crystal structure, lattice constant, film strain and crystal quality.
Field: Metrology and analysis
XRD determines crystal structure and lattice constants from the angles at which X-rays are diffracted by atomic planes in a crystal.
What can mainly be evaluated by X-ray diffraction (XRD)?GaN (gallium nitride) AFM (atomic force microscope) CD-SEM Defect inspection system EDX (energy-dispersive X-ray spectroscopy) Ellipsometry FIB (focused ion beam) Four-point probe method SEM (scanning electron microscope) SIMS (secondary ion mass spectrometry)