What is Capacitive sensing?
A method that detects displacement, pressure and the like from changes in capacitance between movable and fixed electrodes. It is widely used in MEMS sensors.
Field: MEMS and sensors
Related terms
Accelerometer Anodic bonding Bosch process (deep RIE) Coriolis force Gyroscope Hall-effect sensor MEMS Piezoresistive effect Sacrificial layer etching Stiction