Metrology and analysis

What is mainly measured with an atomic force microscope (AFM)?

  1. ASheet resistance
  2. BDepth distribution of impurity concentration
  3. CFine surface topography (shape and roughness)
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Answer: C. Fine surface topography (shape and roughness)

An AFM brings a sharp probe tip close to the sample surface and scans while detecting the deflection caused by atomic forces between tip and surface, measuring surface topography. It can measure height differences at the atomic level, so it is used for evaluating surface roughness after CMP and similar tasks.

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