Metrology and analysis

What is the measurement called that shines light on periodic patterns and compares the spectrum of reflected and diffracted light with a model to determine linewidth and cross-sectional shape?

  1. ASIMS
  2. BScatterometry (optical CD metrology, OCD)
  3. CTEM observation
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Answer: B. Scatterometry (optical CD metrology, OCD)

Scatterometry measures the spectrum of light reflected and diffracted from periodic test patterns and matches it against spectra calculated from a shape model, determining linewidth, height, sidewall angle and more. Because it is fast and nondestructive, it is used for dimension control on production lines.

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