A microscope that traces a sharp tip over a sample and measures fine surface topography from the forces between tip and surface. It is used, for example, to evaluate surface roughness.
Field: Metrology and analysis
An AFM brings a sharp probe tip close to the sample surface and scans while detecting the deflection caused by atomic forces between tip and surface, measuring surface topography.
What is mainly measured with an atomic force microscope (AF…AFM measures shape by tracing the surface with a tip, so it cannot reach the bottoms of trenches narrower than the tip, and on steep sidewalls the side of the tip makes contact first.
When measuring very narrow trenches or steep sidewalls with…It covers a wider range than AFM, scanning over millimeters.
Which instrument traces a sample surface with a fine stylus…CMP CD-SEM Defect inspection system EDX (energy-dispersive X-ray spectroscopy) Ellipsometry FIB (focused ion beam) Four-point probe method SEM (scanning electron microscope) SIMS (secondary ion mass spectrometry) TEM (transmission electron microscope)