Metrology and analysis

Which method measures wafer carrier lifetime without contact to evaluate metal contamination and the like?

  1. AMicrowave photoconductance decay (μ-PCD)
  2. BSIMS
  3. CXRD
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Answer: A. Microwave photoconductance decay (μ-PCD)

In μ-PCD, a light pulse generates carriers in the wafer, and their decay through recombination is measured from changes in microwave reflection. Metal contamination shortens lifetime, so it is used to monitor contamination in furnaces and similar equipment.

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More Metrology and analysis questions

  1. Which function captures SEM images of defects found in inspection and automatically classifies their types from the images?
  2. Which correctly describes the general difference between "metrology" and "inspection" on a semiconductor production line?
  3. What is the main purpose of performing metrology and inspection partway through the process on a production line?
  4. In production-line metrology, why are only selected wafers or points often measured rather than all of them?
  5. Which correctly describes observing a cross-section in detail after breaking or milling the wafer?