What is Scanner?
An exposure tool that moves the mask and wafer in sync under a slit of light. It is the mainstream production lithography tool and generally projects the mask pattern at 1/4 size.
Field: Lithography
Scanner in the explanations
A scanner illuminates only a slit a few mm wide and moves the mask and wafer synchronously in opposite directions at a 4:1 speed ratio to expose each 26 × 33 mm field.
Which is a characteristic of scanner-type exposure tools?A typical scanner exposes about 26 mm × 33 mm (roughly 858 mm²) per shot and steps across the wafer to cover it.
In current scanner exposure tools, what is the typical maxi…TIAs are used in optical-communication receivers, light sensors and CT-scanner detectors.
Which circuit converts a photodiode current into a voltage …
Questions that mention Scanner (5)
- Which is a characteristic of scanner-type exposure tools?
- In current scanner exposure tools, what is the typical maximum area on the wafer that can be exposed in one exposure (one shot)?
- Which circuit converts a photodiode current into a voltage by feeding the current into the inverting input of an op-amp and converting it with a feedback resistor?
- Which is the correct general order of lithography steps?
- What is the process called that removes, with solvent, the resist that builds up around the wafer edge after spin coating?
Related terms
Photomask (reticle) High-NA EUV Photodiode Operational amplifier (op-amp) Transimpedance amplifier Spin coating ArF excimer laser Bottom anti-reflective coating (BARC) Chemically amplified resist Depth of focus (DOF)