What is RIE (reactive ion etching)?

Dry etching that combines reactive species in a plasma with ions accelerated by an electric field. It enables vertical, anisotropic etching.

RIE (reactive ion etching) in the explanations

Reactive ion etching (RIE) combines chemical reactions driven by radicals from a reactive-gas plasma (fluorine- or chlorine-based, etc.) with bombardment by ions accelerated in an electric field.
Which correctly describes reactive ion etching (RIE)?
This synergy (ion-assisted etching) makes ion-struck feature bottoms etch rapidly, giving RIE its fast, anisotropic character.
Exposing silicon to XeF2 gas and an argon ion beam simultan…