What is Self-bias?
The negative DC potential that the wafer electrode naturally acquires in a capacitively coupled plasma. It accelerates positive ions toward the wafer, aiding anisotropic etching.
Field: Etching
Self-bias in the explanations
On an RF-driven electrode, light, mobile electrons flow in more readily than ions, so a capacitively coupled electrode settles at a negative average DC potential—the self-bias, tens to hundreds of volts.
In plasma tools such as capacitively coupled ones, what is …
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Related terms
Plasma Anisotropic etching ALE (atomic layer etching) Antenna effect ARDE (aspect-ratio-dependent etching) Ashing Aspect ratio Buffered hydrofluoric acid (BHF) Dry etching Endpoint detection