What is Endpoint detection?
Detecting the moment when the target film has been fully etched, commonly by monitoring changes in the plasma's emission spectrum.
Field: Etching
Endpoint detection in the explanations
In practice, variations in thickness and rate mean a short overetch follows endpoint detection.
If etching proceeds at 100 nm/min for 3 minutes, how much f…
Questions that mention Endpoint detection (1)
Related terms
Overetch ALE (atomic layer etching) Anisotropic etching Antenna effect ARDE (aspect-ratio-dependent etching) Ashing Aspect ratio Buffered hydrofluoric acid (BHF) Dry etching Hard mask