What is Antenna effect?
Damage to a gate oxide when a connected conductor, such as a long wire, collects charge like an antenna during plasma processing. Design rules limit the area ratio of such wires to prevent it.
Field: Etching
Related terms
ALE (atomic layer etching) Anisotropic etching ARDE (aspect-ratio-dependent etching) Ashing Aspect ratio Buffered hydrofluoric acid (BHF) Dry etching Endpoint detection Hard mask ICP (inductively coupled plasma)