What is Buffered hydrofluoric acid (BHF)?
Hydrofluoric acid buffered with ammonium fluoride. It is used for wet etching of SiO2 with a stable etch rate and little damage to resist.
Field: Etching
Buffered hydrofluoric acid (BHF) in the explanations
Buffered hydrofluoric acid (BHF) adds ammonium fluoride to HF to stabilize pH, so the concentration of the main etching species (HF2⁻) changes little as the bath is consumed, keeping etch rates steady and resist intact.
Which solution, made by buffering hydrofluoric acid with am…
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Related terms
Wet etching ALE (atomic layer etching) Anisotropic etching Antenna effect ARDE (aspect-ratio-dependent etching) Ashing Aspect ratio Dry etching Endpoint detection Hard mask