What is MEMS?
Micro-electro-mechanical systems. Devices that integrate tiny mechanical structures and electronic circuits using semiconductor microfabrication.
Field: MEMS and sensors
MEMS in the explanations
MEMS (micro-electro-mechanical systems) uses semiconductor deposition, lithography and etching to build tiny mechanical structures with moving parts—springs, proof masses, membranes, mirrors—that act as sensors or actuators.
Which correctly describes MEMS?MEMS gyroscopes resonate a proof mass at several to tens of kHz and detect the tiny orthogonal displacement induced by rotation—typically capacitively—to measure angular rate.
Which force does a vibratory MEMS gyroscope use to detect a…Developed by Bosch in the 1990s, it is used for MEMS and TSV fabrication.
Which correctly describes deep RIE (the Bosch process) used…
Questions that mention MEMS (43)
- Which correctly describes MEMS?
- What is the principle by which a capacitive MEMS accelerometer detects acceleration?
- What is the purpose of sacrificial-layer etching in MEMS fabrication?
- Which force does a vibratory MEMS gyroscope use to detect angular velocity?
- Which correctly describes deep RIE (the Bosch process) used in MEMS fabrication?
- What is the typical way a MEMS microphone converts sound into an electrical signal?
- What is the general ink ejection method of inkjet printer heads made with MEMS technology?
- What is the main reason for sealing the moving parts of MEMS gyroscopes and similar devices in vacuum?
- What is the phenomenon called in which tiny moving parts stick to the substrate due to surface tension or similar forces during MEMS fabrication or use, and stop moving?
- What can be estimated from changes in air pressure using a smartphone's MEMS pressure sensor?
- Why are SOI wafers often used in MEMS fabrication?
- What is the method called that bonds silicon and glass by applying voltage while heating, used for MEMS sealing and similar purposes?
- Which MEMS device is used to scan laser light in automotive LiDAR and similar systems?
- How can the resonant frequency of a MEMS structure consisting of a spring and a mass be raised?
- Which MEMS sensor has been used to decide when to deploy car airbags?
Related terms
Accelerometer Stiction Bosch process (deep RIE) Plasma Wet etching Gyroscope Coriolis force TSV (through-silicon via) ASIC (application-specific integrated circuit) Anodic bonding