What is Anodic bonding?

Joining silicon to sodium-containing glass by heating them together while applying a voltage. It is used, for example, to seal MEMS devices.

Field: MEMS and sensors

Anodic bonding in the explanations

Anodic bonding stacks sodium-containing borosilicate glass (such as Pyrex) on silicon, heats them to 300–450 °C, and applies several hundred to about 1000 V with the glass negative.
What is the method called that bonds silicon and glass by a…

Questions that mention Anodic bonding (1)

What is the method called that bonds silicon and glass by applying voltage while heating, used for MEMS sealing and similar purposes?

Related terms

MEMS Accelerometer Bosch process (deep RIE) Capacitive sensing Coriolis force Gyroscope Hall-effect sensor Piezoresistive effect Sacrificial layer etching Stiction

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