What is Sacrificial layer etching?
A typical MEMS fabrication method that etches away a temporary layer (the sacrificial layer) beneath a structure, freeing beams or membranes so they can move.
Field: MEMS and sensors
Related terms
Accelerometer Anodic bonding Bosch process (deep RIE) Capacitive sensing Coriolis force Gyroscope Hall-effect sensor MEMS Piezoresistive effect Stiction