MEMS and sensors
Which correctly describes MEMS?
- ADevices that integrate tiny mechanical structures with electronic circuits using semiconductor microfabrication
- BHigh-capacity recording devices using magnetic tape
- CDisplay devices made only from glass substrates
Show answer and explanation
Answer: A. Devices that integrate tiny mechanical structures with electronic circuits using semiconductor microfabrication
MEMS (micro-electro-mechanical systems) are devices that use semiconductor fabrication techniques such as deposition, lithography and etching to build tiny mechanical structures with moving parts, used as sensors and actuators. They are used in accelerometers, gyroscopes, microphones, inkjet heads and more.