What is Coriolis force?
An apparent force acting perpendicular to the motion of an object moving in a rotating frame. Vibratory MEMS gyroscopes detect angular rate from the displacement it causes.
Field: MEMS and sensors
Coriolis force in the explanations
When a vibrating mass rotates, a Coriolis force proportional to its velocity and the angular rate acts perpendicular to both the vibration and the rotation axis.
Which force does a vibratory MEMS gyroscope use to detect a…
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Related terms
MEMS Gyroscope Accelerometer Anodic bonding Bosch process (deep RIE) Capacitive sensing Hall-effect sensor Piezoresistive effect Sacrificial layer etching Stiction