MEMS and sensors

What is the main reason for sealing the moving parts of MEMS gyroscopes and similar devices in vacuum?

  1. ATo reduce air resistance (damping), keeping the vibration large and increasing sensitivity
  2. BTo make the moving parts heavier
  3. CTo change the sensor's color
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Answer: A. To reduce air resistance (damping), keeping the vibration large and increasing sensitivity

In a vibratory MEMS gyroscope, the larger and more stable the vibration of the moving part, the higher the sensitivity. Air resistance weakens the vibration, so the inside is sealed in vacuum by wafer-level bonding or similar methods to raise the sharpness of resonance (Q factor).

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More MEMS and sensors questions

  1. What is the phenomenon called in which tiny moving parts stick to the substrate due to surface tension or similar forces during MEMS fabrication or use, and stop moving?
  2. What is the detection principle of semiconductor gas sensors using tin oxide or similar materials?
  3. What does the sensor used in a smartphone's electronic compass detect?
  4. What can be estimated from changes in air pressure using a smartphone's MEMS pressure sensor?
  5. Why are SOI wafers often used in MEMS fabrication?