MEMS and sensors

Which force does a vibratory MEMS gyroscope use to detect angular velocity?

  1. ACoriolis force
  2. BOnly the Coulomb force
  3. CBuoyancy
Show answer and explanation

Answer: A. Coriolis force

When a vibrating object rotates, a Coriolis force acts perpendicular to both the vibration direction and the rotation axis. A MEMS gyroscope detects the tiny displacement caused by this force, for example capacitively, to determine angular velocity. It is used for image stabilization and smartphone orientation sensing.

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More MEMS and sensors questions

  1. Which correctly describes deep RIE (the Bosch process) used in MEMS fabrication?
  2. What is the typical way a MEMS microphone converts sound into an electrical signal?
  3. How does the forward voltage of a silicon PN junction at constant current depend on temperature?
  4. What is the operating principle of the DMD (digital micromirror device) used in projectors?
  5. What is the general ink ejection method of inkjet printer heads made with MEMS technology?