MEMS and sensors

Which MEMS device is used to scan laser light in automotive LiDAR and similar systems?

  1. AMEMS microphone
  2. BAccelerometer
  3. CMEMS mirror (a tiny movable mirror that scans light)
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Answer: C. MEMS mirror (a tiny movable mirror that scans light)

A MEMS mirror tilts a tiny mirror at high speed with electrostatic or electromagnetic force to change the direction of reflected laser light. Because it is small and needs no mechanical rotating parts, it is being used in LiDAR and laser projection displays.

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More MEMS and sensors questions

  1. How can the resonant frequency of a MEMS structure consisting of a spring and a mass be raised?
  2. Which MEMS sensor has been used to decide when to deploy car airbags?
  3. When removing an SiO2 sacrificial layer to free a MEMS structure, which method is suitable for preventing stiction?
  4. Which MEMS fabrication method builds movable structures by processing thin films deposited on the substrate?
  5. Which correctly describes how MEMS sensors are combined with their signal-processing circuits?