MEMS and sensors

What is the phenomenon called in which tiny moving parts stick to the substrate due to surface tension or similar forces during MEMS fabrication or use, and stop moving?

  1. ALatch-up
  2. BStiction
  3. CErosion
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Answer: B. Stiction

MEMS moving parts are so small that surface forces are large relative to their weight, so they can stick to the substrate due to surface tension as rinse liquid dries, electrostatic forces or intermolecular forces. This is called stiction, and it is prevented by supercritical drying, vapor-phase etching and surface treatments.

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