MEMS and sensors

How can the resonant frequency of a MEMS structure consisting of a spring and a mass be raised?

  1. AMake the spring softer and the mass heavier
  2. BMake the spring stiffer or the mass lighter
  3. CChange the color of the structure
Show answer and explanation

Answer: B. Make the spring stiffer or the mass lighter

The resonant frequency of a structure with spring constant k and mass m is f = (1/2π)√(k/m). Making the spring stiffer or the mass lighter raises it. In sensor design, it is chosen to balance sensitivity (softer means larger motion) against response speed and shock resistance.

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  3. Which MEMS fabrication method builds movable structures by processing thin films deposited on the substrate?
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