MEMS and sensors

Which MEMS fabrication method builds movable structures by processing thin films deposited on the substrate?

  1. ABulk micromachining
  2. BSurface micromachining
  3. CDamascene process
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Answer: B. Surface micromachining

Surface micromachining stacks sacrificial and structural thin films on the substrate, patterns them, and finally removes the sacrificial layer to free the structure. Making structures by deeply etching the substrate itself is called bulk micromachining.

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More MEMS and sensors questions

  1. Which correctly describes how MEMS sensors are combined with their signal-processing circuits?
  2. Why does a MEMS accelerometer detect about 1 G of acceleration even when stationary?
  3. What is the processing called that combines information from accelerometers, gyroscopes, magnetometers and other sensors to determine orientation and motion more accurately?
  4. What is an advantage of MEMS oscillators, sometimes used instead of quartz crystals as clock sources?
  5. Which MEMS sensor measures flow rate using the fact that gas flow carries away heat from a heater?