What is Gyroscope?
A sensor that detects rotation rate (angular velocity). MEMS versions use the Coriolis force acting on a vibrating structure.
Field: MEMS and sensors
A sensor that detects rotation rate (angular velocity). MEMS versions use the Coriolis force acting on a vibrating structure.
Field: MEMS and sensors
MEMS Coriolis force Accelerometer Anodic bonding Bosch process (deep RIE) Capacitive sensing Hall-effect sensor Piezoresistive effect Sacrificial layer etching Stiction