Metrology and analysis

In TEM, which technique scans a finely focused electron beam and measures the energy lost by transmitted electrons to map elements and chemical states?

  1. AFour-point probe
  2. BHall measurement
  3. CSTEM-EELS (electron energy loss spectroscopy)
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Answer: C. STEM-EELS (electron energy loss spectroscopy)

In STEM (scanning transmission electron microscopy), a fine electron beam is scanned across the sample. Combined with EELS, which measures how much energy transmitted electrons lose, element types and chemical bonding states can be mapped with near-atomic spatial resolution. It is used to evaluate ultra-thin gate insulators and interfaces.

  • A. The four-point probe measures resistivity.
  • B. Hall measurement determines carrier type, concentration and mobility.
  • C. Correct. Elements and states are probed by the energy loss of transmitted electrons.
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