Metrology and analysis

Which correctly describes the sample preparation needed to observe a sample with a transmission electron microscope (TEM)?

  1. AStack samples to a thickness of several cm
  2. BThin the sample to about 100 nm or less so electrons can pass through it
  3. CDissolve the sample in liquid
Show answer and explanation

Answer: B. Thin the sample to about 100 nm or less so electrons can pass through it

A TEM forms images from electrons that pass through the sample, so the sample must be very thin. For semiconductor devices, the area of interest is commonly cut into a thin lamella with a focused ion beam (FIB). Cross-sectional structures can then be observed at resolution high enough to see atomic arrangements.

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