What is Ellipsometry?
A measurement method that shines polarized light on a sample and determines thin-film thickness and refractive index from the change in polarization on reflection. It is nondestructive.
Field: Metrology and analysis
Ellipsometry in the explanations
Ellipsometry shines polarized light on a sample, measures how the polarization of the reflected light changes, and compares it with an optical model to determine the thickness and refractive index of thin films.
What is mainly measured by ellipsometry (spectroscopic elli…Color thus indicates approximate thickness, once checked against color charts; precise measurement uses ellipsometry or spectral reflectometry.
Why does oxide on silicon appear in different colors depend…
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Related terms
AFM (atomic force microscope) CD-SEM Defect inspection system EDX (energy-dispersive X-ray spectroscopy) FIB (focused ion beam) Four-point probe method SEM (scanning electron microscope) SIMS (secondary ion mass spectrometry) TEM (transmission electron microscope) TXRF (total reflection X-ray fluorescence)