What is Dilute hydrofluoric acid (DHF)?

Hydrofluoric acid diluted with water. It removes native oxide from silicon and leaves a hydrophobic, hydrogen-terminated surface.

Field: CMP and cleaning

Questions that mention Dilute hydrofluoric acid (DHF) (3)

  1. When etched in the same dilute hydrofluoric acid, how do the etch rates of thermal oxide and CVD oxide generally compare?
  2. What is the main purpose of cleaning with dilute hydrofluoric acid (DHF)?
  3. What is the state of a silicon surface whose last cleaning step was dilute hydrofluoric acid?

Related terms

CVD Annealing Native oxide Silicide SC-1 (APM) SC-2 (HPM) Ceria (cerium oxide) CMP Dishing Erosion

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