CMP and cleaning

What is the main purpose of SC-1 (a mixture of ammonia and hydrogen peroxide) in RCA cleaning?

  1. ARemoving metal contamination
  2. BRemoving particles and organics
  3. CRemoving native oxide
Show answer and explanation

Answer: B. Removing particles and organics

SC-1 oxidizes the surface with hydrogen peroxide while lightly etching it with ammonia, lifting particles off for removal. It is also effective at removing organics. Metal contamination is removed with SC-2 (hydrochloric acid and hydrogen peroxide), and native oxide with dilute hydrofluoric acid (DHF).

Practice this topic Back to topic

More CMP and cleaning questions

  1. Which correctly describes 'dishing' in CMP?
  2. What is the main purpose of cleaning with dilute hydrofluoric acid (DHF)?
  3. Which correctly describes the slurry used in CMP?
  4. What is the main purpose of cleaning with a mixture of sulfuric acid and hydrogen peroxide (SPM)?
  5. What in particular must be removed by cleaning after CMP?